Mass Flow Controller HFC-203 (L)

Range: 0 - 500 SLM, Air Accuracy: +/- 1% full scale Repeatability: +/- 0.05% full scale Operating Pressure: 500 psig, Fittings_ 1/2_ Swagelok Power supply: +/- 15 VDC Seal: Viton Output: 0 - 5 VDC Input: 0 - 5 VDC Upstream pressure: 30 psig Downstream pressure: 0 psig Calibration: 5-Punkt Calibration (0°C & 760 Torr) Further specification and options please see data sheet