Mass Flow Meter HFC-201 (L)

Range: 0 - 200 SLM, Methane Accuracy: +/- 1% full scale Repeatability: +/- 0.05% full scale Operating pressure: 500 psig, Fittings: 1/2_ Swagelok, Power supply: +/- 15 VDC Seal: Viton Output: 0 - 5 VDC Input: 0 - 5 VDC Upstream pressure: 30 psig Downstream pressure: 0 psig Calibration: 5-Punkt Calibration Further specification and options please see data sheet